Modeling analysis of unsteady three-dimensional turbulent melt flow duringCzochralski growth of Si crystals

Authors
Evstratov, IY Kalaev, VV Zhmakin, AI Makarov, YN Abramov, AG Ivanov, NG Smirnov, EM Dornberger, E Virbulis, J Tomzig, E von Ammon, W
Citation
Iy. Evstratov et al., Modeling analysis of unsteady three-dimensional turbulent melt flow duringCzochralski growth of Si crystals, J CRYST GR, 230(1-2), 2001, pp. 22-29
Citations number
17
Categorie Soggetti
Physical Chemistry/Chemical Physics
Journal title
JOURNAL OF CRYSTAL GROWTH
ISSN journal
00220248 → ACNP
Volume
230
Issue
1-2
Year of publication
2001
Pages
22 - 29
Database
ISI
SICI code
0022-0248(200108)230:1-2<22:MAOUTT>2.0.ZU;2-S
Abstract
We describe a computational model based on Large Eddy Simulation to calcula te 3D unsteady turbulent melt convection in Czochralski systems for Si-crys tal growth. The model has been verified using temperature measurements insi de the melt and along the melt-crucible surface. The effect of the crucible rotation rate on 3D turbulent structures developed in the melt is analyzed . Transformation of the melt flow with increasing argon flow rate is predic ted, and the controlling effect of the argon flow on the oxygen content in the crystal is evaluated. (C) 2001 Elsevier Science B.V. All rights reserve d.