The microstructure of subgrain boundaries in as-annealed non-doped SrTiO3 s
ingle crystals was studied. When the crystal quality is good, it is difficu
lt to observe lattice defects using only transmission electron microscopy (
TEM). In such cases, pre-observation by X-ray topography is useful. Hence,
the author used both TEM and X-ray topographic techniques. X-ray topographs
showed the defect distribution throughout the crystals. [011]-Type crystal
s generally have subgrain textures. High-resolution transmission electron m
icroscopy revealed that the subgrain boundaries were small-angle tilt bound
aries formed by partial dislocations of 1/2(110) Burgers vectors and there
were no segregation of impurities.