Electrical and stability properties and ultrasonic microscope characterisation of low temperature co-fired ceramics resistors

This paper presents systematic investigations of electrical and stability p roperties of various low temperature co-fired ceramics (LTCC) resistors. On e of the goals of this work was to check the compatibility of LTCC material s (tapes, resistive and conductive inks) from various manufacturers. Three commercially available green tapes and three LTCC resistor/conductor system s were examined. The resistive inks with 1 k Omega /sq. nominal sheet resis tance were used. Buried (inside) and surface resistors were laminated and f ired according to the tape manufacturers' recommendations. The influence of dimensional effect on sheet resistance and hot temperature coefficient of resistance, the temperature dependence of resistance in a wide temperature range (from -180 degreesC to +130 degreesC), long-term stability of thermal ly aged as-fired resistors (150 degreesC, 500 h) and durability to high-vol tage micro- or nanosecond pulses (50 ns pulses with 4000 V/mm maximum elect ric field or 10 mus ones with 700-1000 V/mm electrical field) were carried out for electrical and stability characterisation of LTCC resistors. Non-de structive scanning acoustic microscope diagnostics was applied for structur e investigation and estimation of lamination and cofiring process quality o f buried LTCC resistors. (C) 2001 Elsevier Science Ltd. All rights reserved .