Four versions of low-energy ion scattering (LEIS) measurements are briefly
reviewed. In the first version discussed here the charged fraction of scatt
ered noble-gas ions is detected with an electrostatic analyser. The composi
tion of exclusively the outermost layer is probed in this way, even when th
e surface of the sample is not smooth. The second method probes the surface
step density, and thereby growth oscillations, with grazing-angle specular
scattering, whereby the scattered particles are measured without energy re
solution. An example is given of the observation of oscillations during the
growth of Ag on Ag (0 0 1) at several temperatures. The oscillations are c
ompared with oscillations obtained from simulations of the growth process,
combined with LEIS simulations. This second method is also sensitive to the
structure of the outermost layer. There is no sensitivity to the compositi
on of the surface. In the third method either the beam direction, or the di
rection of the detector, makes a grazing angle with the surface, and atoms
scattered over a large (non-specular) angle are detected with time-of-fligh
t (TOF) resolution. This provides sensitivity only to atoms protruding from
the surface, like adatoms, or atoms at step edges. An example is presented
whereby this method is used to measure adatom mobilities. Finally the conv
entional method of measuring with TOF resolution azimuth scans of scattered
or recoiled particles in a shadowing or blocking geometry is described. Th
e scans are compared with the results of computer simulations carried out f
or trial structures. The properties of the program MATCH that can be used e
fficiently for these simulations are summarised. As an example of the appli
cation of this method the determination of the surface structure of Fe3O4 (
0 0 1) is presented. The features of the LEIS versions presented are compar
ed with MEIS and HEIS features. with emphasis on the possibility to obtain
information on the composition and structure, separately for the first few
layers of a sample. (C) 2001 Elsevier Science B.V. All rights reserved.