Miniaturized 3-D surface profilometer using a fiber optic coupler

Citation
Tl. Pennington et al., Miniaturized 3-D surface profilometer using a fiber optic coupler, OPT LASER T, 33(5), 2001, pp. 313-320
Citations number
20
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTICS AND LASER TECHNOLOGY
ISSN journal
00303992 → ACNP
Volume
33
Issue
5
Year of publication
2001
Pages
313 - 320
Database
ISI
SICI code
0030-3992(200107)33:5<313:M3SPUA>2.0.ZU;2-S
Abstract
A 3-D surface profilometer is described which uses a simple fiber optic cou pler to form a Young's double pinhole interferometer. The Young's fringes a re projected onto a surface, captured by a camera and analyzed using the Fo urier transform method. The phase of the fringe pattern on the object is us ed to reconstruct the surface profile. System analysis, results from a simu lation, and preliminary experimental results are provided which indicate a system resolution on the order of a tenth of a millimeter. (C) 2001 Elsevie r Science Ltd. All rights reserved.