Electrostatically actuated microstructures can undergo large deformations f
or certain geometric configurations and applied voltages. The use of linear
theories in such cases can produce inaccurate results. By selecting a rang
e of geometric parameters (such as beam lengths, thicknesses and gaps), we
identify the regimes, where linear theories become inaccurate and necessita
te the use of nonlinear theories. In cases where linear theories produce in
accurate results, we propose a mixed-regime approach to combine Linear and
nonlinear theories. We show that a mixed-regime approach can be more effici
ent compared to a full nonlinear simulation of the electrostatically actuat
ed structure. This paper also proposes the use of meshless techniques for e
fficient simulation of linear and nonlinear behavior in electrostatic MEMS.
(C) 2001 Elsevier Science B.V. All rights reserved.