A multifunctional silicon-based microscale surgical system

In this paper, we report our progress on the development of silicon-based s urgical tools. We report on the integration of piezoresistive sensors in no ise insensitive Wheatstone configuration, silicon nitride/platinum composit e overhanging blades, fluid channels, and electrical packaging features to make the device highly multifunctional. Multiple polysilicon piezoresistors were integrated onto bulk-micromachined ultrasonic transducers that were u sed to measure the ultrasonic strain, and the force applied to the cutting tip. The use of thin silicon nitride/metal composites films for cutting in vitro human retinas at the cellular level is demonstrated. (C) 2001 Elsevie r Science B.V. All rights reserved.