Effect of the target surface temperature on the distribution of nanoparticles formed by ion implantation

Metal-nanoparticle-containing composite layers were synthesized by implanta tion of 60 keV Ag+ ions into a soda-lime silicate glass to a dose of 3 x 10 (16) ion/cm(2) at an ion beam current density of 3 muA/cm(2) and a substrat e temperature of 35 degreesC. The results of implantation depend on the tem perature effects developed in the glass targets of various thicknesses. Dat a on the silver distribution profile and the nucleation and growth of metal nanoparticles in depth of the implanted layers were obtained from the opti cal reflection spectra. It is demonstrated that even small variations in th e surface temperature of the ion-bombarded glass substrate lead to signific ant changes in the conditions of nanoparticle formation in the sample. (C) 2001 MAIK "Nauka/Interperiodica".