Solid-state phase reactions in the initial and vacuum-annealed (T = 500 deg
reesC, 1 h) TiBx-GaAs junctions were studied. Thermal treatment of the samp
les leads to changes in a transition layer structure, with the formation of
BxGa1-xAs and TixGa1-xAs ternary phases. A physical mechanism explaining t
hese structural transformations is proposed. (C) 2001 MAIK "Nauka/Interperi
odica".