Imidized organic thin films were deposited onto glass substrates by rf magn
etron sputtering of polyimide (Kapton) target. The mass spectra of sputtere
d species indicated that target materials were cracked into smaller molecul
es and the generated films on glass substrates were not identified to be po
lyimide but wear properties of the films were found to be rather superior t
o Kapton. (C) 2001 Elsevier Science B.V. All rights reserved.