Imidized organic thin films deposited on glass substrates

Authors
Fukushima, K Ikeda, Y Hayashi, T Kikuchi, N Kusano, E Kinbara, A
Citation
K. Fukushima et al., Imidized organic thin films deposited on glass substrates, THIN SOL FI, 392(2), 2001, pp. 254-257
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
392
Issue
2
Year of publication
2001
Pages
254 - 257
Database
ISI
SICI code
0040-6090(20010730)392:2<254:IOTFDO>2.0.ZU;2-9
Abstract
Imidized organic thin films were deposited onto glass substrates by rf magn etron sputtering of polyimide (Kapton) target. The mass spectra of sputtere d species indicated that target materials were cracked into smaller molecul es and the generated films on glass substrates were not identified to be po lyimide but wear properties of the films were found to be rather superior t o Kapton. (C) 2001 Elsevier Science B.V. All rights reserved.