Influence of substrate temperature and sputtering atmosphere on electricaland optical properties of double silver layer systems

Authors
Kloppel, A Meyer, B Trube, J
Citation
A. Kloppel et al., Influence of substrate temperature and sputtering atmosphere on electricaland optical properties of double silver layer systems, THIN SOL FI, 392(2), 2001, pp. 311-314
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
392
Issue
2
Year of publication
2001
Pages
311 - 314
Database
ISI
SICI code
0040-6090(20010730)392:2<311:IOSTAS>2.0.ZU;2-A
Abstract
A new method for the preparation of double silver layer systems with ultra- low resistance and high visible transmittance for use as low-emissivity (lo w -E) coatings, low resistance transparent electrodes for display applicati ons and also electromagnetic interference (EMI) shieldings in plasma displa y panel (PDP) applications has been successfully developed. in this paper, the results of an optimization of the deposition conditions of both oxide l ayers and metallic layers using indium-tin oxide (ITO) and indium-cerium ox ide (ICO) as transparent oxides and a silver alloy as a metallic layer are illustrated. (C) 2001 Elsevier Science B.V. All rights reserved.