Detection of NH2 radical in ammonia radio-frequency plasmas by laser-induced resonance fluorescence

By means of one photon absorption laser-induced resonance fluorescence at 5 99.5 nm the relative concentrations of the amidogen (NH2) radical in the am monia (NH3) radio-frequency (rf) plasma source were measured under differen t discharge pressures and rf powers. The time dependence of the fluorescenc e which comes from the radiation 1(01)-2(11) of the P-branches of the Sigma vibronic sub-bands can be described by a single-exponential decay. The dec ay time of NH2(A(2)A(1)) Sigma (0, 9, 0) rovibronic State was determined. T he spatial dependence of the NH2 density in the discharge tube was measured .