X-ray reflectometry study of diamond-like carbon films obtained by plasma-enchanced chemical vapor deposition

X-Ray reflectivity is used to determine the electron density profiles norma l to the surface of diamond-like carbon (DLC) films prepared by plasma-enha nced chemical vapor deposition (PE-CVD). Average values of the scattering l engths obtained from the specular reflection data and elastic recoil detect ion analysis (ERDA) hydrogen measurements are used to calculate the average mass density of the films, The density is shown to be strongly dependent o n the hydrogen content. This depends on the plasma parameters. Argon dilute d methane plasma produces homogeneous DLC films but generally with a lower density than the films prepared from pure or He diluted plasmas. These late r plasmas produce films with a high density contrast and higher densities. (C) 2001 Elsevier Science B.V. All rights reserved.