AXIAL DEPENDENCE OF THE ELECTRON-ENERGY DISTRIBUTION FUNCTION IN MICROWAVE DISCHARGES SUSTAINED BY PROPAGATING SURFACE-WAVES

The dependence of the electron energy distribution function on the axi al position is measured in a microwave surface wave sustained plasma. On the basis of these electron energy distribution functions the axial variations of the average electron energy and the frequencies of diff erent processes initiated by electron impact are calculated. The resul ts are coupled to the local electron energy balance in order to obtain the axial variations of the maintenance electric field intensity towa rds the end of the plasma column. Radial orientation of the measuring probe, compensation technique and an advantageous positioning of the l arge electrode probe are used.