Determination of stoichiometry and concentration of trace elements in thinBaxSr1-xTiO3 perovskite layers

Authors
Becker, JS Boulyga, SF
Citation
Js. Becker et Sf. Boulyga, Determination of stoichiometry and concentration of trace elements in thinBaxSr1-xTiO3 perovskite layers, FRESEN J AN, 370(5), 2001, pp. 527-533
Citations number
22
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences
Journal title
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY
ISSN journal
09370633 → ACNP
Volume
370
Issue
5
Year of publication
2001
Pages
527 - 533
Database
ISI
SICI code
0937-0633(200107)370:5<527:DOSACO>2.0.ZU;2-K
Abstract
This paper describes an analytical procedure for determining the stoichiome try of BaxSr1-xTiO3 perovskite layers using inductively coupled plasma mass spectrometry (ICP-MS). The analytical results of mass spectrometry measure ments are compared to those of X-ray fluorescence analysis (XRF). The perfo rmance and the limits of solid-state mass spectrometry analytical methods f or the surface analysis of thin BaxSr1-xTiO3 perovskite layers sputtered ne utral mass spectrometry (SNMS) - are investigated and discussed.