A novel HEMT configuration based on the RESURF technique is proposed for ve
ry high voltage power switching applications. It employs a p-n junction bel
ow the 2-DEG channel and two field plates, one extending from the gate and
the other from the drain, to distribute the electric field over the gate to
drain separation. 2-D simulations indicate a breakdown voltage >1 KV at on
-resistance of similar to1 m Omega -cm(2) (neglecting contact resistances)
for the device.