A model for the low frequency noise of polycrystalline silicon thin film tr
ansistors (polysilicon TFTs) is proposed. The model takes into account fluc
tuations of the grain boundary potential barrier induced by those of the gr
ain boundary interface charge and fluctuations of carriers due to trapping
in oxide traps located close to the interface. Using the proposed model, it
is demonstrated that both grain boundary and oxide taps can be determined
in polysilicon TFTs from noise measurements.