Pi-gate SOI MOSFET

Citation
Jt. Park et al., Pi-gate SOI MOSFET, IEEE ELEC D, 22(8), 2001, pp. 405-406
Citations number
7
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEEE ELECTRON DEVICE LETTERS
ISSN journal
07413106 → ACNP
Volume
22
Issue
8
Year of publication
2001
Pages
405 - 406
Database
ISI
SICI code
0741-3106(200108)22:8<405:PSM>2.0.ZU;2-X
Abstract
This paper describes computer simulations of various SOI MOSFETs with doubl e and triple gate structures, as well as gate-all-around devices. The conce pt of a triple-gate device with sidewalls extending into the buried oxide t hereby called a "II-gate" or "Pi-gate" MOSFET) is introduced. The proposed device is simple to manufacture and offers electrical characteristics simil ar to the much harder to fabricate gate-all-around MOSFET.