A detailed investigation of the quantum yield (QY) experiment is proposed,
Experimental data show that no correlation exists between the QY and the st
ress-induced leakage current (SILC), and that the QY is determined by high-
energy oxide traps, Numerical simulations are then used, based on a detaile
d calculation of the oxide defect distribution. It is shown that the leakag
e current and the excess impact ionization component are due to trap-assist
ed tunneling (TAT) of electrons through different sets of traps: Deep level
s are responsible for the SILC, while high-energy states determine the impa
ct ionization current. Simulation results are in good agreement with experi
ments, showing that the QY results cannot be used to extract the energy los
s of the SILC electrons.