The gate current of different submicron MOS structures has been calculated
using two different approaches to evaluate the eigenvalue energy and the es
cape-time of the quasi-bound states of the potential energy well at the Si/
SiO2 interface. The numerical issues involved in the implementation of thes
e approaches tone semi-classical, the other quantum-mechanical) inside a de
vice simulator are presented. Simulations performed on different thin-oxide
MOS structures show that, compared to the quantum-mechanical treatment, th
e semi-classical approach is faster, numerically less demanding, and surpri
singly accurate in estimating the escape-times, Nevertheless, differences i
n the eigenvalue energy computed assuming open or closed boundary-condition
s at the system boundaries sensibly affect the predicted gate current value
s.