MEASUREMENT OF CONCENTRATION DISTRIBUTION OF ETCHANT USING AN ELECTROCHEMICAL PROBE

Authors
SU LY LUO J WU JT LIN ZH TIAN ZW
Citation
Ly. Su et al., MEASUREMENT OF CONCENTRATION DISTRIBUTION OF ETCHANT USING AN ELECTROCHEMICAL PROBE, Chemistry Letters, (7), 1997, pp. 611-612
Citations number
6
Categorie Soggetti
Chemistry
Journal title
Chemistry Letters → ACNP
ISSN journal
03667022
Issue
7
Year of publication
1997
Pages
611 - 612
Database
ISI
SICI code
0366-7022(1997):7<611:MOCDOE>2.0.ZU;2-D
Abstract
Concentration distribution of electrogenerated etchant bromine as clos e as 8 micrometer to the surface of the macrodisk is studied quantitat ively with an electrochemical probe technique. The feasibility of micr o-fabrication using the confined etchant layer technique is further ve rified.