Atomic force microscope (AFM) was used to investigate dewetting of a fluori
nated polymer on mica. Thermally induced dewetting of thin films starts wit
h formation of rims around small holes and grows as the sizes of the holes
increase until the top layer forms stable, isolated droplets whose sizes hi
ghly depend on the initial film thickness. A 6 nm thick layer of polymer, w
hich is very stable during the annealing process, still covers the substrat
e after surface dewetting.