An atomic force microscopy study of relatively large residual Berkovich, Vi
ckers and spherical nano indentations in four metals and two ceramics (high
-temperature superconductor YBCO and polycrystalline silicon nitride) is de
scribed. It is shown that residual nano indentations in these materials, wh
ich are free from extensive cracking, change of temperature and environment
al attack, do not show any measurable relaxation even over a period of up t
o two years. This fact, combined with our previous continuous in situ obser
vations from indentation experiments on MgO single crystals, indicates that
careful and detailed investigations of nano indentations with metrological
atomic force microscopes can be carried out, without there being a risk of
any measurable relaxation, either in their dimensions or profiles, even we
ll after the indentations have been made.