Sputtered a-Si : H thin-film position sensitive detectors

This paper reports on three different position sensitive detector (PSD) str uctures based on rf sputter deposited amorphous silicon. Most of the work r eported by other researchers on thin-film PSDs has been based on plasma enh anced chemical vapour deposition p-i-n structures but the structures in thi s work are based on much simpler fabrication procedures. The results show e xcellent sensitivities and linearities and work extremely well under unbias ed conditions. To assess the wavelength response of the devices they were c ompared under red and white light beams. The performances under red light w ere unremarkable while under white they were very good, showing high sensit ivities and linearities. The devices work best under unbiased conditions an d so are simple to configure for practical applications. The outputs obtain ed required no amplification.