An ultra-high vacuum soft X-ray diffractometer has been constructed and com
missioned at the Synchrotron Radiation Research Center (SRRC) to investigat
e materials structures in mesoscale. The diffractometer, housed in a UHV ta
nk, consists of a 6-circle goniometer, together with the systems for beam-c
ollimation, signal detection, vacuum, and control panels. The kappa-phi-psi
goniostat is adopted for the sample orientation. Crystal samples can be ro
tated along a given reciprocal lattice vector by using psi scan. Two orthog
onal axes,, (or 2 theta) and delta, are used to move the detector. The dete
ctor is a semiconductor pin diode, which can be used in UHV ambient. This 6
-circle goniometer allows for sample scanning of a wide range in the moment
um space. The motors used for goniometer rotation and slit selection are UH
V compatible. The UHV tank is placed on an XYZ table capable of positioning
the center of the goniometer onto the incident beam. Test experiments have
been carried on the 1-9 keV double-crystal monochromator (DCM) beamline to
commission the diffractometer. These include powder diffraction of standar
d quartz crystals, 0-2 theta scans of zeolite thin films, specular reflecti
vity of Ti2O5/SiO2/Zerdur multilayers, soft X-ray multiple diffraction of s
ilicon single crystals, and the polarization effects on three-beam diffract
ion. The obtained experimental results demonstrate the excellent capability
of the diffractometer in characterizing both mososcopic and microscopic st
ructures of matter. (C) 2001 Elsevier Science B.V. All rights reserved.