A method of polarization spectroscopy for a conducting surface characterize
d by a high sensitivity to the state of the surface and its transition laye
r is proposed. The method uses excitation of surface electromagnetic waves
(SEWs) by a linearly polarized probe beam incident on the surface under stu
dy and compensation for the phase shift between the p and s components aris
ing upon the SEW excitation. The applicability and competitiveness of the m
ethod in both the visible and the IR range is established. The method is te
sted on an LEF-3M ellipsometer in the visible range by studying the oxidati
on process in an evaporated copper film. (C) 2001 MAIK "Nauka/Interperiodic
a".