The silicon/adsorbed oxygen superlattice was introduced as an epitaxial bar
rier for silicon quantum devices. A barrier height of similar to0.5 eV with
a thin layer of silicon sandwiched between two adsorbed oxygen layers has
been achieved. This work describes a similar structure with nine periods wh
ich may serve as a replacement of the present amorphous silicon dioxide gat
e for metal oxide semiconductor field effect transistor. The insulating pro
perty derived from our current-voltage (I-V) and conductance-voltage (G-V)
measurements indicates that the scheme may serve as a replacement of silico
n on insulator. (C) 2001 American Institute of Physics.