Hq. Ni et al., Investigation of Li-doped ferroelectric and piezoelectric ZnO films by electric force microscopy and Raman spectroscopy, APPL PHYS L, 79(6), 2001, pp. 812-814
We have grown Li-doped ZnO films on silicon (100) using the rf planar magne
tron sputtering method. The surface charges induced piezoelectrically by de
fect and by polarization can be observed by electric force microscopy. The
Li-doped ZnO films have been proven to be ferroelectric. The Raman spectra
of ZnO and Li-doped ZnO films have been measured. (C) 2001 American Institu
te of Physics.