We describe the development of a consistent set of low-energy electron coll
ision cross sections for trifluoromethane, CHF3. First-principles calculati
ons are used to obtain key elastic and inelastic cross sections. These are
combined with literature values of the ionization cross section and with vi
brational excitation cross sections obtained from the Born approximation to
form a preliminary set, which is then adjusted to achieve consistency with
measured swarm parameters. (C) 2001 American Institute of Physics.