Methods of correction for analysis of depth-sensing indentation test data for spherical indenters

Depth-sensing indentation testing has proven extremely useful in the determ ination of mechanical properties of thin films and small volumes of materia l. However, the validity of the results obtained depend largely on the corr ections made to the experimentally recorded data to account for initial pen etration depth, nonuniformities in indenter shape, and compliance of the lo ading frame. The present work examines each of these issues and presents po tential methods of correction for them. The present work also highlights li mitations inherent in the data analysis methods and the significance of the se in terms of experimental test parameters.