Review - Grain and subgrain characterisation by electron backscatter diffraction

Authors
Citation
Fj. Humphreys, Review - Grain and subgrain characterisation by electron backscatter diffraction, J MATER SCI, 36(16), 2001, pp. 3833-3854
Citations number
84
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE
ISSN journal
00222461 → ACNP
Volume
36
Issue
16
Year of publication
2001
Pages
3833 - 3854
Database
ISI
SICI code
0022-2461(200108)36:16<3833:R-GASC>2.0.ZU;2-M
Abstract
The application of automated Electron Backscatter Diffraction (EBSD) in the scanning electron microscope, to the quantitative analysis of grain and su bgrain structures is discussed and compared with conventional methods of qu antitative metallography. It is shown that the technique has reached a stat e of maturity such that linescans and maps can routinely be obtained and an alysed using commercially available equipment and that EBSD in a Field Emis sion SEM (FEGSEM) allows quantitative analysis of grain/subgrains as small as similar to0.2 mum. EBSD can often give more accurate measurements of gra in and subgrain size than conventional imaging methods, often in comparable times. Subgrain/cell measurements may be made more easily than in the TEM although the limited angular resolution of EBSD may be problematic in some cases. Additional information available from EBSD and not from conventional microscopy, gives a new dimension to quantitative metallography. Texture a nd its correlation with grain or subgrain size, shape and position are read ily measured. Boundary misorientations, which are readily obtainable from E BSD, enable the distribution of boundary types to be determined and CSL bou ndaries can be identified and measured. The spatial distribution of Stored Energy in a sample and the amount of Recrystallization may also be measured by EBSD methods. (C) 2001 Kluwer Academic Publishers.