A review of focused ion beam applications in microsystem technology

In this paper the possibilities of focused ion beam (FIB) applications in m icrosystem technology are reviewed. After an introduction to the technology and the operating principles of FIB, two classes of applications are descr ibed. First the subject of FIB for microsystem technology inspection, metro logy and failure analysis is outlined. A procedure for cross sectioning on samples is presented, as well as some examples of how this technique can be applied to study processing results. The second part of the paper is on th e use of FIB as a toot for maskless micromachining. Both subtractive (etchi ng) and additive (deposition) techniques are discussed, as well as the comb ination of FIB implantation of silicon with subsequent wet etching. We will show the possibility to fabricate three-dimensional structures on a microm etre scale, and give examples of recent realizations thereof.