Citation
M. Brauer et al., Silicon microphone based on surface and bulk micromachining, J MICROM M, 11(4), 2001, pp. 319-322
Citations number
6
Categorie Soggetti
Mechanical Engineering
Journal title
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
ISSN journal
09601317
→ ACNP
Volume
11
Issue
4
Year of publication
2001
Pages
319 - 322
Database
ISI
SICI code
0960-1317(200107)11:4<319:SMBOSA>2.0.ZU;2-S
Abstract
In this paper a silicon microphone which can be fabricated using standard s
emiconductor processes is presented. The acoustic-electrical transducer is
based on the capacitance change of a movable 400 nm thin poly-silicon membr
ane with different diameters (800-1200 mum). A source follower was integrat
ed to transform the impedance. The complete chip is 2 x 2 x 0.5 mm(3) in si
ze. The sensitivity achieved is in the range of 0.4 to 3.2 mV Pa-1.