Electrostatic parallel-plate actuators with large deflections for use in optical moving-fibre switches

Lateral electrostatic parallel-plate actuators with deflections up to 70 mu m for optical moving-fibre switches are presented. The fabrication process is based on bulk micromachining of {110}-silicon. Different designs are inv estigated with respect to low driving voltages and sufficiently large force s using iterative numerical simulations. Lateral deflections of > 62.5 mum as required for 1 x 2 switches with standard optical fibres have been achie ved with driving voltages below 30 V. A combination of two actuators allows bi-directional operation as required for fibre switches. These actuators a re also suitable for all applications where large deflections with short sw itching times and low power consumption but limited force are required. Mor eover, these parallel-plate actuators show a digital switching characterist ic.