The early stage of silicon heteroepitaxial growth and germanium homoepitaxi
al growth on Ge(001) has caused a discrepancy between experimental and theo
retical work. Previously a dimer configuration was identified experimentall
y, which theoretically has been predicted to be unfavorable: the D dimer. U
pon careful reinvestigation this cluster turns out to be not a two-atom, bu
t a three-atom cluster. The three-atom cluster of Ge or Si on Ge(001) is sh
own to differ from a C dimer, a small epitaxial island (BD) or the three-at
om cluster of Si on Si(001). (C) 2001 American Vacuum Society.