Preparation of cross-sectional transmission electron microscopy specimens of obliquely deposited magnetic thin films on a flexible tape

Authors
Keim, EG Bijker, MD Lodder, JC
Citation
Eg. Keim et al., Preparation of cross-sectional transmission electron microscopy specimens of obliquely deposited magnetic thin films on a flexible tape, J VAC SCI A, 19(4), 2001, pp. 1191-1194
Citations number
13
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
19
Issue
4
Year of publication
2001
Part
1
Pages
1191 - 1194
Database
ISI
SICI code
0734-2101(200107/08)19:4<1191:POCTEM>2.0.ZU;2-8
Abstract
In this article a method is described for preparing cross sections of obliq uely deposited metal thin films on polymer substrates for transmission elec tron microscopy (TEM) observation. The layers of interest are brittle in na ture and therefore it is difficult to obtain suitable TEM samples with conv entional methods. Apart from the sample preparation method some details of the deposition technique will be elucidated. (C) 2001 American Vacuum Socie ty.