Plasma diagnostics in large area plasma processing system

A series of plasma diagnostic have been carried out in our large area plasm a processing system which is based on a modulated electron-beam produced pl asma. These discharges were created in both electrically conducting and ins ulated vacuum chambers operated in 30-120 mTorr of pure gases (argon, oxyge n, and nitrogen). Langmuir probes, microwave transmission, mass spectrometr y, and external current sensors show robust discharges were made over fairl y wide parameter ranges resulting in plasma densities of 1-4 x 10(11) cm(-3 ) and temperature ranging from 0.2 eV for the molecular gases and 1.4 eV fo r argon. The effects of various experimental techniques, parameters, and co ntamination issues are discussed in detail. (C) 2001 American Vacuum Societ y.