Ct. Reeves et al., Molecular dynamics simulations of the trapping of ethane on Si(100)-(2x1):Effect of rotational energy and surface temperature, J VAC SCI A, 19(4), 2001, pp. 1543-1548
Classical molecular dynamics simulations have been used to investigate the
effect of rotational energy and surface temperature on the trapping probabi
lity of ethane on Si( 100) - 2 X 1. At all translational energies studied,
the trapping probability remains constant as the rotational state of the in
cident molecule is increased to the equivalent of J = 20, then decreases as
the rotational energy is further increased. Over the range of incident tra
nslational energies (0.1-0.6 eV) and angles (0 degrees to 60 degrees) studi
ed, when J = 40, the trapping probability has decreased by about 30% relati
ve to the probability at low J values. Computed trajectories also indicate
that surface temperature can affect trapping probabilities. Simulations ind
icate that for trajectories with 0.3 eV of translational energy at normal i
ncidence, increasing the surface temperature from 65 to 200 K will not sign
ificantly change the trapping probability. However, if the surface temperat
ure is raised to 600 K, the trapping probability falls to about half of the
trapping probability at 65 K. (C) 2001 American Vacuum Society.