Characterization of organic low-dielectric-constant materials using optical spectroscopy

The dielectric function spectra of low dielectric constant (low-k) material s have been determined using high-precision four-zone null spectroscopic el lipsometry, near-normal incidence reflection spectrometry and Fourier trans form infrared transmission spectroscopy. The optical functions over a wide spectral range from 0.03 to 5.4 eV (230 nm to 40.5 mum wavelength region) h ave been evaluated for representative low-k materials used in the semicondu ctor industry for interlayer dielectrics: (1) FLARE - organic spin-on polym er, and (2) HOSP - spin-on hybrid organic-siloxane polymer from the Honeywe ll Electronic Materials Company. (C) 2001 Optical Society of America.