Characterization of organic low-dielectric-constant materials using optical spectroscopy

Citation
K. Postava et al., Characterization of organic low-dielectric-constant materials using optical spectroscopy, OPT EXPRESS, 9(3), 2001, pp. 141-151
Citations number
21
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
OPTICS EXPRESS
ISSN journal
10944087 → ACNP
Volume
9
Issue
3
Year of publication
2001
Pages
141 - 151
Database
ISI
SICI code
1094-4087(20010730)9:3<141:COOLMU>2.0.ZU;2-1
Abstract
The dielectric function spectra of low dielectric constant (low-k) material s have been determined using high-precision four-zone null spectroscopic el lipsometry, near-normal incidence reflection spectrometry and Fourier trans form infrared transmission spectroscopy. The optical functions over a wide spectral range from 0.03 to 5.4 eV (230 nm to 40.5 mum wavelength region) h ave been evaluated for representative low-k materials used in the semicondu ctor industry for interlayer dielectrics: (1) FLARE - organic spin-on polym er, and (2) HOSP - spin-on hybrid organic-siloxane polymer from the Honeywe ll Electronic Materials Company. (C) 2001 Optical Society of America.