Anisotropy of the spatial distribution of In(Ga)As quantum dots in In(Ga)As-GaAs multilayer heterostructures studied by x-ray and synchrotron diffraction and transmission electron microscopy
Nn. Faleev et al., Anisotropy of the spatial distribution of In(Ga)As quantum dots in In(Ga)As-GaAs multilayer heterostructures studied by x-ray and synchrotron diffraction and transmission electron microscopy, SEMICONDUCT, 35(8), 2001, pp. 932-940
High-resolution X-ray and synchrotron (crystal truncation rods) diffraction
methods and transmission electron microscopy have been employed to study M
BE-grown multilayer In(Ga)As-GaAs heterostructures with arrays of verticall
y coupled In(Ga)As quantum dots (QDs) in a GaAs matrix. Additional (vertica
l and lateral) spatial ordering of QDs in perfect crystalline structures, g
iving rise to undulations of the crystalline planes and quasi-periodic elas
tic strain, was shown to be essentially anisotropic with respect to crystal
lographic directions of the [110] type. The anisotropy of the QD formationa
l system of can be accounted for by assuming that the spatial ordering of t
he QDs and the corrugation of the crystal planes are the initial stages of
relaxation of the elastic strain introduced into the system by the QDs. The
anisotropic relief of the crystal planes (corrugated growth surface) resul
ts from the formation of a system of spatially ordered quantum quasi-wires
uniformly filled with QDs. In a multilayer heterostructure with high crysta
l perfection, the anisotropic relief of the crystal planes is inherited by
overlying layers and its amplitude decreases gradually with increasing dist
ance from the source of elastic strain-the superstructure containing In(Ga)
As QDs in the given case. (C) 2001 MAIK "Nauka/Interperiodica".