Optimization of semiconductor dew point hygrometer mirrors surface temperature homogeneity

The temperature homogeneity on the dew point hygrometer mirror is one of th e most important factor effected on measurement accuracy. The semiconductor mirror structure facilitated with thermoresistor, two heaters and with add itional dew/frost detector has been computer simulated for recognition of t emperature distribution on its surface. Two detector structures, the first one located on silicon membrane and the second placed on bulk materials hav e been compared in the paper. The analysis of optimal heating power applied to heaters to achieve homogenous detector surface temperature distribution has been presented in the report. Finally, the simulation results have bee n compared with measurement results. (C) 2001 Elsevier Science B.V. All rig hts reserved.