Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer

This paper describes a piezoelectric micromachined silicon accelerometer fa bricated using a combination of thick-film printing and silicon micromachin ing and introduces a microprocessor implemented self-validation routine for the device. The thick-film printed PZT elements act as sensors detecting t he deflections of the inertial mass and also as actuators capable of perfor ming a self-test routine. The self-validation procedure is performed at res onance and therefore, a microprocessor is used to identify the resonant fre quency associated with each device and confirm the operation of the PZT ele ments. Whilst, this approach is certainly feasible, its implementation can be simplified by reducing the cross-talk between drive and detection elemen ts and altering the geometry of the accelerometer. The performance of the d evice demonstrates the suitability of thick-film printed piezoelectrics for this type of application. (C) 2001 Elsevier Science B.V. All rights reserv ed.