Comparative analysis of DLC flim fine structure by Raman spectra and X-rayphotoelectron spectroscopy

The diamond-like carbon (DLC) films were deposited under different depositi on parameters by using are technology. The detailed relationship of sp3 str ucture with the D peak of the DLC films' Raman spectra is discussed. In aid of the discussion, Xray photoelectron spectroscopy was used to determine t he DLC films' Cls binding energy. By comparing the binding energy with the Raman shift of the films, it can be found that the intensity of D peak deco mposed from the Raman shift can be increased not only by the graphite clust er, but also by higher content of sp3 bonds. Higher sp3 content of DLC film s can be obtained by using 90 degree magnetic filter. The study shows that the Cls binding energy of DLC films, whose Raman spectra have higher intens ity of D peak, can be 294.15 or 285.50 eV, which reveals that the DLC films may have higher graphite-like or diamond-like structure, respectively.