Mechanical and optical properties of CNx films with high N/C ratio

Authors
Jelinek, M Kulisch, W Delplancke-Ogletree, MP Lancok, J Jastrabik, L Chvostova, D Popov, C Bulir, J
Citation
M. Jelinek et al., Mechanical and optical properties of CNx films with high N/C ratio, APPL PHYS A, 73(2), 2001, pp. 167-170
Citations number
39
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
ISSN journal
09478396 → ACNP
Volume
73
Issue
2
Year of publication
2001
Pages
167 - 170
Database
ISI
SICI code
0947-8396(200108)73:2<167:MAOPOC>2.0.ZU;2-V
Abstract
Nitrogen-rich carbon nitride films were prepared by three different deposit ion methods on fused silica, stainless steel and silicon cantilever substra tes. Their optical properties were studied by spectroscopic ellipsometry an d UV spectrometry. Mechanical properties such as plastic and Vickers microh ardness, Young's modulus, adhesion and film stress were also tested. The re sults were compared with the properties of films with lower nitrogen concen trations.