AES depth profiling multilayers of 3d transition metals

Multilayer structures composed of 3d transition metals were investigated by AES in combination with sputter depth profiling. The samples were trilayer s Permalloy/Cu/Permalloy, Co/Cu multilayers and a spin-valve structure. Ove rlapping Auger peaks were separated by a fit-to-spectra of bulk standards. Sample rotation during sputtering improves the depth resolution and made de tection of unintentionally deposited Cu possible. For very thin films the depth profiles are influenced by measuring effects. The effects of atomic mixing, surface roughness and information depth onto the depth profiles in the spin-valve structure were simulated using the MR I model. (C) 2001 Elsevier Science B.V. All rights reserved.