Kossel and pseudo Kossel CCD pattern in comparison with electron backscattering diffraction diagrams

Kossel and pseudo Kossel interferences, i.e. lattice source interferences ( LSI) and divergent beam X-ray interferences (DBI), as well as electron back scattering diffraction (EBSD) are complementary physical methods of investi gation, by means of which material-physical parameters can be obtained from microscopic small specimen areas in a non-destructive way. The interferenc es are taken with a high-resolution and time-integrating CCD camera [in Pro ceedings of the 15th International Congress on X-Ray Optics and Microanalys is (ICXOM), August 1998, Antwerp, Belgium; J. Anal. At. Spectrom, (The Roya l Society of Chemistry) 14 (1999) 409] and at once transmitted to the compu ter for evaluation. Thus. these techniques can be used in situ. For the met hods LSI and DBI, the reflections are indexed and evaluated with the own de veloped simulation program KOPSKO [Cryst. Res. Technol. 34 (7) (1999) 801]. In the present case, these three methods, besides other detectors, were add itionally installed by us in the CamScan CS44 scanning electron microscope for the analysis of micro regions in solids. Because of the different excit ation or diffraction ranges of the techniques, information comes from diffe rent specimen depths of some nanometers to about 100 mum. On this way, the range of application for the determination of the parameters was considerab ly increased. By the examples of a single-crystalline ceramic specimen of B aTiO3 as well as a Fe monocrystal one the range of application is demonstra ted by the determination of the crystallographic direction with respect to the specimen surface all three methods are compared. (C) 2001 Elsevier Scie nce B.V. All rights reserved.