GaN films grown on (1 1 1) Si substrate by means of low pressure MOCVD tech
nique in a horizontal flow quartz reactor are characterized by different th
in layer analysis methods. The polycrystalline hexagonal structure of the G
aN layers has been checked by means of grazing incidence X-ray diffractomet
ry and IR spectroscopy. Cathodoluminescence (CL) spectra and their time kin
etics are studied. The mean decay time of the 3,44 eV UV bound exciton tran
sition is below I ns, whereas the 3.26 eV violet band shows a slow hyperbol
ical decay over about I ps. A third yellow band appears at 2.12 eV due to t
ransitions via localized states. (C) 2001 Elsevier Science B.V. All rights
reserved.