MECHANISTIC STUDIES OF THE THERMOLYSIS OF TETRANEOPENTYLTITANIUM(IV) .2. SOLID-STATE AND ULTRA-HIGH-VACUUM STUDIES OF THE CHEMICAL-VAPOR-DEPOSITION OF TIC FILMS
J. Cheon et al., MECHANISTIC STUDIES OF THE THERMOLYSIS OF TETRANEOPENTYLTITANIUM(IV) .2. SOLID-STATE AND ULTRA-HIGH-VACUUM STUDIES OF THE CHEMICAL-VAPOR-DEPOSITION OF TIC FILMS, Journal of the American Chemical Society, 119(29), 1997, pp. 6814-6820
The chemical pathway responsible for the conversion of the organotitan
ium compound tetraneopentyltitanium to titanium carbide has been studi
ed under chemical vapor conditions and on single crystals in ultra-hig
h vacuum. For every equivalent of TiNp4 consumed in the deposition pro
cess, 3.28 equiv of neopentane and 0.16 equiv of isobutane are produce
d; other organic species are also formed but in relatively small amoun
ts. About 93% of the carbon and hydrogen originally present in the pre
cursor can be accounted for in these products. Thermolysis of the spec
ifically deuterated analogue Ti(CD2CMe3)(4) yields a 2.25:1 ratio of n
eopentane-d(3) and neopentane-d(2); this result combined with a kineti
c isotope effect of 4.9 at 385 K shows unequivocally that the first st
ep in the deposition pathway under CVD conditions is alpha-hydrogen ab
straction. The alpha-hydrogen abstraction step produces 1 equiv of neo
pentane and a titanium alkylidene, which undergoes further alpha- (and
eventually gamma-) hydrogen activation processes to generate the seco
nd and third equivalents of neopentane. In the last stages of the ther
molysis sequence, neopentyl (or neopentyl-derived) organic groups evid
ently fragment and generate the carbon atoms that eventually form the
titanium carbide phase. Spectroscopic studies with IR and HREELS techn
iques have also been carried out in order to provide additional eviden
ce about the nature of the species present when single crystal surface
s dosed with TiNp4 are heated. A band at 1121 cm(-1) is tentatively as
cribed to the v(M=C) band of surface-bound neopentylidene groups.