On-chip separation of inorganic anions by ion-exchange chromatography was r
ealized. Micro separation channels were fabricated on a silicon wafer and s
ealed with a Pyrex cover plate using standard photolithography, wet and dry
chemical etching, and anodic bonding techniques, Quaternary ammonium latex
particles were employed for the first time to coat the separation channels
on-chip. Owing to the narrow depths of the channels on the chip, 0.5-10 mu
m, there were more interactions of the analytes with the stationary phase o
n the chip than in a 50-mum I.D. capillary. With off-chip injection (20 nl)
and UV detection, NO2-, NO3- I-, and thiourea were separated using I mM KC
I as the eluent. The linear ranges for NO2- and NO3- are from 5 to 1000 muM
with the detection limits of 0.5 muM. (C) 2001 Elsevier Science B.V. All r
ights reserved.