Carbon masks for the fabrication of submicron YBa2Cu3Ox bridges and Josephson junctions

Authors
Volkov, IA Kalabukhov, AS Snigirev, OV Zherikhin, AN Mavrin, BN
Citation
Ia. Volkov et al., Carbon masks for the fabrication of submicron YBa2Cu3Ox bridges and Josephson junctions, J COMMUN T, 46(7), 2001, pp. 822-825
Citations number
7
Categorie Soggetti
Information Tecnology & Communication Systems
Journal title
JOURNAL OF COMMUNICATIONS TECHNOLOGY AND ELECTRONICS
ISSN journal
10642269 → ACNP
Volume
46
Issue
7
Year of publication
2001
Pages
822 - 825
Database
ISI
SICI code
1064-2269(200107)46:7<822:CMFTFO>2.0.ZU;2-A
Abstract
A technology is worked out for the fabrication of thin-film submicron YBa2C U3Ox Josephson junctions on bicrystal substrates. The masks fabricated on c arbon films prepared by laser ablation technique are used for the ion beam etching of YBa2CU3Ox thin films. Carbon deposition regimes are obtained tha t allow one to preserve the superconducting properties of YBa2CU3Ox thin fi lms.